News Release:Pioneer To Introduce High Precision Electron Beam Recorder

Information contained in the news release is current as of the date of announcement.
It is subject to change without prior notice.

Pioneer
April 2, 2004
Pioneer Corporation
Pioneer FA Corporation

Pioneer To Introduce High Precision Electron Beam RecorderMaking it easier to make master discs for high-density optical discsincluding Blu-ray Discs

April 2, 2004, Tokyo, Japan - Pioneer Corporation and its subsidiary, Pioneer FA Corporation, announced today that they have jointly developed a high-precision electron beam recorder (EBR) by utilizing their fine-processing technology and equipment technology, which will make it easier to manufacture master discs for next-generation optical discs such as Blu-ray Discs. Pioneer FA will start selling the new high-precision EBR in early April, 2004.

In the conventional optical-disc mastering process, many disc manufacturers have been using laser beam recorders (LBR), which utilize ultraviolet (UV) lasers or deep-ultraviolet (Deep-UV) lasers as light source. Pioneer's high-precision EBR employs an electron beam as a recording beam to sharply narrow the beam diameter, which can realize even finer pattern processing in the mastering process, compared with LBRs.

The high-precision EBR also achieves high levels of record-positioning accuracy, thanks to the high-precision recording position control technology, which the Pioneer group developed when it started with production of Laser Discs. Pioneer's EBR can manufacture master discs for high-density optical discs including Blu-ray discs, as well as Discrete Track Media and Patterned Media - higher-density hard disks regarded as highly promising future technologies.

Since Pioneer's Corporate R&D Laboratories began basic research on a high-precision EBR in 1993, its results have been presented at academic conferences and study groups. In the meantime, Pioneer's high-precision EBR technology has been highly evaluated as a key technology indispensable for the development of next-generation discs. In addition to that, the demand for such technology has been growing. Accordingly, Pioneer has decided to launch this high-precision EBR.

Pioneer FA expects that the market will expand and plans on promoting the development of next generation EBRs to realize even higher-density recording together with Pioneer.

Main features

  1. Stable electron beam emission with a large current by utilizing a thermal/field type emitter.
  2. Large, high-density recording capacity of 50GB or more on one side of a φ 12 cm disc.
  3. High track-pitch accuracy.
  4. High productivity with a load-lock chamber

‹‹ Pit Pattern samples by an LBR and EBR ››

LBR EBR
LBR EBR
Capacity: 4.7GB
Track pitch: 0.74µm
Min. pit length: 0.40µm
Capacity: 50GB
Track pitch: 0.23µm
Min. pit length: 0.12µm

< Main Specifications >

Electron beam emitter: Thermal/field emission type
Acceleration voltage: 50kV
Modulation speed: 6ns or lower (10% to 90%)
Beam deflector: 2-stage, bi-directional, 10ns or lower (10% to 90%)
Objective lens aperture: 4 positions selectable
Beam diameter/Beam current: φ80nm/90nA or more
Spindle motor: Vacuum seal air spindle motor
Rotation speed 60r.p.m - 2,400r.p.m
Substrate: Silicone wafer (max. 8 inches)
Focus control: Optical height sensor (range: ±250µm)
Stage position sensor: Laser interferometer (resolution ability: 0.6nm)

< For further information, please contact: >

Public Relations
Pioneer Corporation, Tokyo, Japan Phone: +81-3-3495-9885

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